Mechanics of adhesion in MEMS — a review

نویسندگان

  • Y.-P. ZHAO
  • L. S. WANG
چکیده

A review is presentedof the mechanics of microscale adhesion in microelectromechanical systems (MEMS). Some governingdimensionlessnumbers such as Tabor number, adhesionparameter and peel number for microscale elastic adhesion contact are discussed in detail. The peel number is modiŽ ed for the elastic contact between a rough surface in contact with a smooth plane. Roughness ratio is introduced to characterize the relative importance of surface roughness for microscale adhesion contact, and three kinds of asperity height distributions are discussed: Gaussian, fractal, and exponentialdistributions. Both Gaussian and exponentialdistributionsare found to be special cases of fractal distribution. Casimir force induced adhesion in MEMS, and adhesion of carbon nanotubes to a substrate are also discussed. Finally, microscale plastic adhesion contact theory is brie y reviewed, and it is found that the dimensionless number, plasticity index of various forms, can be expressed by the roughness ratio.

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تاریخ انتشار 2003